Aera FC-780CHT高溫金屬密封蒸汽質量流量控制器
Aera? FC-780CHT MFCs withstand high temperatures and prevent condensation in applications that require the heating of a liquid source to generate sufficient vapor pressure for MFC flow control.
Configured with the printed circuit board in a separate module that is not subjected to elevated heat, FC-780CHT MFCs are able to withstand the effects of bake-out at high temperatures.
Aera FC-780CHT系列質量流量控制器能經受高溫，在液體加熱產生大量蒸汽的環(huán)境質量流量控制時可以防止冷凝收縮。
隔離的模塊線路設計使得控制器不受高溫影響，FC-780CHT能夠有效抵抗烘烤環(huán)境時的高溫影響。
流量范圍：10sccm-5slm
Benefits:
High reliability
Long-term zero drift stability
優(yōu)點：
高可靠性
長期零點漂移的穩(wěn)定性
Features:
Rugged, high-temperature design
Metal seals
Solenoid control valves
80°C(176°F) max temp for MFC base
50°C(122°F) max temp for remote electronic controller
特點：
牢固，高溫設計
金屬密封
電磁控制閥
本體***高支持溫度80°C(176°F)
遠程控制器***高支持溫度50°C(122°F)
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